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MEMSnet Home: MEMS-Talk: wet etchant for Sn and Sn oxide
RIE etch for glas
2003-11-06
PAtrick Carlberg
wet etchant for Sn and Sn oxide
2003-11-06
Robert Dean
2003-11-07
rakesh babu
2003-11-07
Mighty Platypus
2003-11-07
David Nemeth
wet etchant for Sn and Sn oxide
rakesh babu
2003-11-07
dear sir,

 Tin and Tin oxide are difficult to etch using wet etchant and the only wet
etchant found to etch it is Hydrobromic acid.

best regards
Rakesh
Graduate Research Assistant
ECE  Department
Wayne state University

Robert Dean  wrote:
Hello,

Can someone recommend a wet etchant for Sn and Sn oxide that does not etch
Si, Ni or Ti?

Thanks!

Sincerely,

Robert Dean

Research Associate IV
Center for Advanced Vehicle Electronics
Auburn University
200 Broun Hall
Auburn, AL 36849

Voice: 334-844-1838
Fax: 334-844-1898
Email: [email protected]
Web: http://www.eng.auburn.edu/~deanron


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