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MEMSnet Home: MEMS-Talk: Protective Coating in KOH solution!!!!
Protective Coating in KOH solution!!!!
2003-11-07
KANISHKA BISWAS
RE : [mems-talk] Protective Coating in KOH solution!!!!
2003-11-07
Christophe Gorecki
2003-11-07
Shane Jones
2003-11-07
Zhang, Wenyue(Lydia)
2003-11-12
Neal Ricks
2003-11-14
Glenn Silveira
2003-11-07
Michael L
2003-11-14
Kretschmer Hans-Richard
Protective Coating in KOH solution!!!!
Shane Jones
2003-11-07
Hi Kanishka,

Brewer Science will soon be introducing a new material called ProTEK(tm) that is
targeted for this application.  For additional information, please visit our web
site at  http://www.brewerscience.com/smproducts/sm_mems_protec.html  or contact
the Specialty Materials
Division at 573-364-0300.

Regards,
Shane Jones,
Brewer Science

KANISHKA BISWAS wrote:

> Hi Everybody,
>               Can any one suggest a protective coating (polymer etc)for
protecting the top surface of silicon wafer with aluminium lines while etching
the back side of the wafer using KOH solution???? We have already tried out wax,
black wax coatings but it did not work.
> Any help and references in this regard will be highly appreciated....
> Thanks
> Kanishka
>
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