Hi Pancham,

I have used references from Herb Sawin from MIT who has studied DRIE and all
the metioned effects intensively.

Regards,

Jobert van Eisden

SUNY Albany


-----Original Message-----
From: Pancham R. Patel
To: [email protected]
Sent: 11/6/2003 8:41 PM
Subject: [mems-talk] DRIE references, undercutting, overcutting and
anti-footing control.

Hi,
?
Just looking for a good reference on DRIE.
Undercutting, overcutting and anti-footing control for
wet/dry etches.
Can somebody pl. give me a good reference (textbook or
a paper).

Thanks,
Pancham.
?



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