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MEMSnet Home: MEMS-Talk: Wafer Temperature Measurement
Wafer Temperature Measurement
1997-11-28
Ruhmer Klaus
Wafer Temperature Measurement
Ruhmer Klaus
1997-11-28
Hi !
The systems from
SENSARRAY CORPORATION
2388 Walsh Avenue
Santa Clara, California 95051-1301 U.S.A.
Phone (408) 727.4656
Fax 408.496.6929

... are the ones we have used before.  For special applications, we
produce our own temperature wafers by bonding a pyrex wafer onto a
silicon wafer.  The pyrex wafer has machined grooves to hold
thermocouples.
To measure the temperatures, there are several data aquisition boards
for thermocouples available.

I hope I could help !

Klaus Ruhmer
Applications Engineer
Electronic Visions Inc.
email:  [email protected]
web:    http://www.elvisions.com
phone:  602-437-9492 x 121
fax:            602-437-9435


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