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MEMSnet Home: MEMS-Talk: Thermal coefficient of expansion on SI vs orientation
Thermal coefficient of expansion on SI vs orientation
2003-11-13
D H Grantham
2003-11-14
Shay Kaplan
Thermal coefficient of expansion on SI vs orientation
D H Grantham
2003-11-13
Hi, Ken:  If you've not already gotten an answer to your question regarding
coefficient of expansion, I can tell you that there is a difference.  {111}
shows isotropic behavior in the plane of the wafer, as I recall.  I don't have
the numbers off the top of my head but can tell you that there are handbook
answers regarding these and and similar properties.  I do not recall that
resistivity makes a big difference.

harry grantham
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