Think image reversal, metal lift off, and dimensions down to 0.1 micron.  Bill
Moffat

-----Original Message-----
From: Raj Kumar [mailto:[email protected]]
Sent: Thursday, November 13, 2003 10:06 PM
To: [email protected]
Subject: [mems-talk] Dry etching of Platinum



Hello Friends!
       I was looking for some dry etch recipe for patterning Platinum
with 1 micron dimensions. In addition to that I was also looking for the
stability of Platinum in KOH and TMAH based wet anisotropic etching. Any
guideline and/or reference in this context will be highly appreciated.

Rajkumar,India


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