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MEMSnet Home: MEMS-Talk: how to rinse small structure?
how to rinse small structure?
2003-11-19
Yilei Zhang
2003-11-19
Steven F. Nagle
2003-11-19
Borski, Justin
2003-11-19
John Fuste
2003-11-20
Jason Viotty
how to rinse small structure?
Yilei Zhang
2003-11-19
Hello all:
Can I use DI water+N2 in a tank to rinse wafer with small structures? Will it
damage the structure, for example, will the cantilevers break during the
rinse? thanks.


Regards,
Yilei Zhang










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