depends on the size of the structures.  you will need to test it,
probably with only a small amount of N2 at first, maybe none.  your
biggest problem will be drying (perhaps that's what you meant by N2?)
-steven

Yilei Zhang wrote:

>Hello all:
>Can I use DI water+N2 in a tank to rinse wafer with small structures? Will it
>damage the structure, for example, will the cantilevers break during the
>rinse? thanks.
>
>
>Regards,
>Yilei Zhang
>
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