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MEMSnet Home: MEMS-Talk: Capcitance cantilever sticking - Ronda Irwin
Capcitance cantilever sticking - Ronda Irwin
1997-12-04
CARROLL-JW
Capcitance cantilever sticking - Ronda Irwin
CARROLL-JW
1997-12-04
Try forming a spacer hump on one plate.  That should keep them from sticking
together.  You might have to do some recalibration of the capacitance constants
though, but that is minor.


                        James Carroll


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