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MEMSnet Home: MEMS-Talk: Ion Assisted Deposition
Ion Assisted Deposition
1997-12-04
Susan Eshelman
Ion Assisted Deposition
Susan Eshelman
1997-12-04
We are interested in testing and ordering a complete, turnkey Ion Assisted
Deposition evaporator. We would rather not purchase the ion source and
evaporator separately, which seems to be the standard operating procedure.
This would be a machine for R&D, so we are not interested in paying for lots
of bells & whistles, or in buying more than one (at this time).

In addition, we would consider sending wafers out of house for IAD. We are
most concerned with film stress and dielectric constant; these are not
optical coatings, and so the parameters would need to be optimized differently.


 Please forward any relevant information to: [email protected].

Many thanks!

Susan Eshelman
Susan Eshelman
Member, Technical Staff
Raytheon TI Systems
[email protected]
(972) 995-2476


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