Dear MEMSers,

I'm a new comer in industry and I should build a KOH etching setup for research
purposes. What kind of arrangement would be suitable for 4" wafers? Process
temperature is between 55 and 95 [C], maximum number of wafer is 5, I should be
also able to etch quarters of wafers and I don't have much money for this. Of
course temperature control shoud be steady. And what kind of materials have
been used for this (PTFE, PFA, stainless steel, ..)?
Should there be stirrer or N2 bubbling or should the wafers revolve in KOH?

Your help is highly appreciated,
Antti