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Message: 4
Date: Mon, 1 Dec 2003 23:59:52 -0500 (EST)
From: Xiaohui Li 
Subject: [mems-talk] Help: how to reflow SU-8 after crosslinking
To: [email protected]
Message-ID:
        
Content-Type: TEXT/PLAIN; charset=US-ASCII

Hi,

I am trying to reflow SU-8 after cross-linking.  Looks that SU-8 is very
difficult to reflow after cross-linked although it has a glass transition
temperature.  Did anyone reflow SU-8 before?  Can I get some suggestions?

I really appreciate any suggestions.


Xiaohui



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Dear Xiaohui,

The glass transition temperature of SU-8 after crosslinking is approximately
230C, but don't expect much to happen. Because the density of crosslinking in
SU-8 is very high, there is not much change in the film after processing, even
at high temperatures. Shrinkage will occur to around 350C with the maximum
change occurring before 270C. After that a 5% weight loss is noted at 364C with
the char temperature being 900C.

Very Best Regards,
Rob Hardman
617-965-5511 ext.313
[email protected]