Is Gu element 107, or do you mean a residue of goo on your wafer?
If it's the latter, you can mix sulfuric acid and hydrogen peroxide
anywhere from 1:1 to 3:1 to 5:1 to 60:1.
High-peroxide solutions are self-heating.
Low-peroxide solutions are used commercially, with a bath
of sulfuric acid held at 120 C and a small amount of hydrogen peroxide added
just before wafer cleaning.

    --Kirt Williams, Ph.D.    consultant

----- Original Message -----
From: "Z.,W.Y.(Lydia)" 
To: "General MEMS discussion" 
Sent: Monday, December 01, 2003 8:08 AM
Subject: [mems-talk] Wet etch Gu with Sulfuric acid/hydrogen peroxide


> Dear all,
>
> Can I wet etch Gu with Sulfuric acid/hydrogen peroxide? What is the
mixture
> ratio and temperature? Thanks!
>
> Lydia
>
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