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MEMSnet Home: MEMS-Talk: Etch mask for glass etching
Etch mask for glass etching
2003-12-06
Tom Fan
2003-12-07
Aegis
2003-12-07
Wong
2003-12-09
Wong
Etch mask for glass etching
Tom Fan
2003-12-06
Hi All,

When people use Cr/Au as the etch mask for wet etching of glass, what kind of
deposition method did they use? I used resistive evaporation method and found
the metal film collapsed and gave way to the etchant in a very short time. I
suspect the film adhesion is not that good. Maybe sputtering will do a better
job? Anybody had experience with this situation? Any thoughtful input would be
appreciated.

Thanks,
Tom Fan


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