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MEMSnet Home: MEMS-Talk: Mosfet ohmic contats with RIE processes
Mosfet ohmic contats with RIE processes
2003-12-06
[email protected]
Mosfet ohmic contats with RIE processes
[email protected]
2003-12-06
Can anyone show me how to realize drain/source contacts in mosfet fabbrication
with RIE processes.
reply
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