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MEMSnet Home: MEMS-Talk: Can you strip the hard cured BCB?
Can you strip the hard cured BCB?
2003-12-11
Joonyeop Lee
2003-12-11
Bill Moffat
2003-12-11
Sjoerd Haasl
Can you strip the hard cured BCB?
Joonyeop Lee
2003-12-11
Hi everyone.

I have a question to ask and would highly appreciated the help.

I have used BCB(Benzocyclobutene) as low-k dielectric and it was hard cured at
250℃.

But i want to strip hard cured BCB.

Do you know any process or stripper that can strip it ?

Sincerly

reply
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