Hello Joonyeop,
Hard-cured BCB is hard to strip.
The solvent mesitylene might work - very slowly. We use it to clean
non-cured BCB off the spinning chuck. I even used physical rubbing to remove
non-cured BCB rests off a mask. Xylene is supposed to work as well.
A CF4 and O2 plasma etch will etch the BCB, but can attack the silicon below
it, too.
Hot H2SO4:H2O2 3:1 should also work. (See Greg Miller,
http://mail.mems-exchange.org/pipermail/mems-talk/2002-February/006406.html)
Best regards,
Sjoerd Haasl
_____________________________________________________
Royal Institute of Technology
Department of Signals, Sensors and Systems
Microsystem Technology
S-100 44 Stockholm, Sweden
_____________________________________________________

> Message: 9
> Date: Thu, 11 Dec 2003 10:17:38 +0900
> From: "Joonyeop Lee" 
> Subject: [mems-talk] Can you strip the hard cured BCB?
> To: 
> Message-ID: <007101c3bf84$90dbfb70$79822e93@passive>
> Content-Type: text/plain; charset="ks_c_5601-1987"
>
> Hi everyone.
> I have a question to ask and would highly appreciated the help.
> I have used BCB(Benzocyclobutene) as low-k dielectric and it was hard
cured at 250¡É.
> But i want to strip hard cured BCB.
> Do you know any process or stripper that can strip it ?