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MEMSnet Home: MEMS-Talk: High Selectivity for GaAs over AlAs for Wet Chemical Etching
High Selectivity for GaAs over AlAs for Wet Chemical Etching
2003-12-12
Sai Raghav Parasa
High Selectivity for GaAs over AlAs for Wet ChemicalEtching
2003-12-14
Oray Orkun Cellek
2003-12-14
Sai Raghav Parasa
High Selectivity for GaAs over AlAs for Wet Chemical Etching
Sai Raghav Parasa
2003-12-14
Hi All,

Can you give me 3 best etchants which have high selectivity for GaAs over AlAs
for Wet Chemical Etching?

The etchants should etch GaAs effectively and should not attack AlAs.

Thanks,
Parasa,
University of Kassel, Germany.


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