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MEMSnet Home: MEMS-Talk: photoresist on poly-si
photoresist on poly-si
2003-12-16
sreenivas K
photoresist on poly-si
sreenivas K
2003-12-16
Hai All,
Can anyone suggest me a photoresist which sticks on
poly-si which inturn is on pyrex. As i want to etch
pyrex for about 12 µm, and any suggestion for the
etchant to be used. Thanks in advance.

Regards,
Chinu

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