Hello everybody,

for a 3 wafer project I have to make an SU-8 layer of less than 1um. I have
Su-8-25 available with EPON/GBL 60%/40%. Spinning this 40sec at 6200rpm
(this is maximum) leads to a 10um layer after PEB. Does any one knows how to
thin and spin SU8-25 that a 1um layer can be done.

Regards,
Heiko

pruessner@micromotive.de

Micromotive GmbH
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55129 Mainz

Tel.: 06131/62780-10
Fax.: 06131/62780-15