Hi Shekhar,

We do sputter SiN with RF as well as DC sputtering on glass, Silicon,
Plastic etc. Please let me know if you need any specific information.

Ravi Mullapudi
Hionix, Inc.
2157 O'Toole Ave., Suite: E
San Jose, CA 95131
www.hionix.com



-----Original Message-----
From: Indu Shekhar Bajpayee ; JPA(DFM)
[mailto:is_bajpayee@ece.iitkgp.ernet.in]
Sent: Tuesday, December 16, 2003 11:33 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] SiN deposition on glass



 anybody have experience with the deposition of SiN on the glass substrate
with the help of RF sputtering unit.
kindly guide me.
thanks
INDU SHEKHAR BAJPAYEE
JPA, MICROELECTRONICS CENTER
INDIAN INSTITUTE OF TECHNOLGY
KHARAGPUR
WEST BENGAL -721302




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