Dear MEMS researchers,

I need to etch a 2-3 micron deep cavity in glass (Corning 7740).
Can anyone suggest either a dry etch or wet etch recipe which
results in smooth edges around the cavity?

Also, if anyone knows of any commercial vendors that would provide glass
etch as a service (with high quality), I'd appreciate it if you let me
know.

Thanks.

Sonbol Ansari