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MEMSnet Home: MEMS-Talk: PDMS+AU pattern
PDMS+AU pattern
2003-12-22
[email protected]
2003-12-23
Karin Buchholz
PDMS+AU pattern
[email protected]
2003-12-22
Hi

Actually, I spined a PDMS layer on a SI wafer. After curing, I need to transfer
my pattern on the PDMS layer by gold deposition and using lift off process.Can I
make my pattern by photoresit and then evaporate gold? Is there any special
recepie?

Best regards,
Hasan Sharifi
Purdue University


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