US4882245. FYI, Microlithography Chemicals commercialized SU-8.
Good Luck!

> ----------
> From:         Ramadas, Padmaja[SMTP:ramadas@ti.com]
> Reply To:     Ramadas, Padmaja
> Sent:         Thursday, December 11, 1997 4:48 AM
> To:   MEMS@ISI.EDU
> Subject:      IBM SU-8
>
> IBM has developed a polymer that can be spun upto 500um thick.
> This can be exposed under a regular ultraviolet light. They have a
> patent
> on it. Does anyone know the patent number or their WEB site so that I
> can
> take a look at it.
>
> Thank you,
> Padmaja
>
>
> ***************************************************************
> Padmaja Ramadas, Ph.D.
> e-mail: ramadas@ti.com
> Texas Instruments
> (972) 927-1108 (w)
> 13532 N. Central Expy., MS 77                         Fax:(972)
> 995-3180
> Dallas, TX  75243
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>
>