Nadav,

It's nice to hear a familiar voice.  To answer your question, or at least
get you started off in the right direction, look here:
http://mail.mems-exchange.org/pipermail/mems-talk/1998-June/001712.html

or here:
http://mail.mems-exchange.org/pipermail/mems-talk/2002-October/008703.html

Hope that helps.

David Schreiber



-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf
Of Nadav Agian
Sent: Tuesday, December 30, 2003 1:38 PM
To: [email protected]
Subject: [mems-talk] AZ5214 remover


I am using an AZ5214 P.R as a protective coating for dicing .
I tried to remove the coating with Acetone , but I still have some residuals
around the Al lines.
Is there a better way to remove those marks ?


Nadav
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