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MEMSnet Home: MEMS-Talk: PAN etch Nickle
Photocurable PDMS
2003-12-23
Z.,W.Y.(Lydia)
2003-12-24
allen kine
PAN etch Nickle
2003-12-30
Z.,W.Y.(Lydia)
wet etching Ni edge is rough Re: [mems-talk] PAN etch Nickle
2004-01-01
Tony Li
2004-01-02
Customer Service
2004-01-03
Tony Li
PAN etch Nickle
Z.,W.Y.(Lydia)
2003-12-30
Dear All,

Is it possible to etch nickle using PAN (Phosphoric Acid (H3PO4)
:Acetic Acid (HAc): Nitric Acid (HNO3): DI water = 16:1:1:2)? And what
temperature?

I try to etch nickle on top of silicon wafer and using PR as mask. Try to save
some money instead of buying nickle etchant.

Happy New Year!

Lydia




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