We have had a similar problems sometimes, and the AZ resist stripper
(remover) works well.
Also we clean with O2 plasma or O2 ashing.
Good luck.

T. Sophie Hamano


-----Original Message-----
From: Nadav Agian [mailto:[email protected]]
Sent: dinsdag 30 december 2003 12:38
To: [email protected]
Subject: [mems-talk] AZ5214 remover


I am using an AZ5214 P.R as a protective coating for dicing .
I tried to remove the coating with Acetone , but I still have some residuals
around the Al lines.
Is there a better way to remove those marks ?


Nadav