Hy Lanzy
I suggest you do wet etching with HF. So best masking layer is poly-Si.

Greetings
Stefan

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On
Behalf Of lanzy
Sent: Dienstag, 6. Januar 2004 05:03
To: [email protected]
Subject: [mems-talk] Did anybody try to etching through a glass wafer?


Dear all,
I want to etch through the 7740 glass wafer which is 0.5mm thick. What
kind of material can I use as the mask for etching? I tried PR and Gold
but both failed. I wonder whether you have some expirience to share with
me.
Thank you so much.

Best regards,
Lanzy
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