Hi Iskandar,
for behalf of aligning two wafers we have some equipment where you can optically
align within sub-µm accurracy and bond the wafer afterwards together.
For the alignment we have several methods available (backside alignment, IR
alignment, face-to-face,etc.), depended on which side your wafers have the
alignment keys.
All these methods are working without any pyramids or ruby balls or something
else.....

best regards
Stefan


Stefan Pargfrieder

EV Group
Technology Group - Tel: +43 7712 5311-0, Fax: 4600
e-mail: [email protected],
www.EVGroup.com



-----Original Message-----
From: [email protected]
[mailto:[email protected]]On
Behalf Of Iskandar
Sent: Mittwoch, 07. Jänner 2004 16:09
To: [email protected]
Subject: [mems-talk] Help with aligning two wafers


Hi all,

I was hoping someone could help me with aligning two Si wafers. Its to make a
micromotor whereby the wafers contain the rotor and stator respectively. I was
hoping that if the wafers were crystalline I could make pyramid holes in each
using anisotropic KOH etching and drop ruby balls between the two wafers to
align them. However this requires a film of Si Nitride on each wafer, which is
tedious considering many more features have to be laid out as well.

Any help at all will be considered. The alignment preferebaly should be as
accurate as possible - however realistically the stator is about 1000um (1mm)
diameter so some error can be tolerated.

Thanks all for the help - ISSA
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