Dear Iskandar,

SUSS MicroTec is offering equipment for aligning and bonding wafers for MEMS
applications. Please feel free to visit our web page to get an overview of
our tools: http://www.suss.de

Since you may not wish to purchase a bunch of machines just for processing a
few wafers, it might be helpful for you to know that we are offering
applications services as well. The nearest spot for you, where we have all
our aligning and boding equipment available to process your wafers, would be
the SUSS Applications Center in Munich, Germany.

Please feel free to contact me to discuss if our technology would be an
appropriate solution for your application and if you are interested in using
our services.

Frank.


--------------------------------------------
SUSS MicroTec
Applications Manager RSC Europe
Frank Runkel
Schleissheimer Str. 90
85748 Garching
Germany
Fon     +49 89 32007 - 302
Fax     +49 89 32007 - 390
email   [email protected]



> ------------------------------
>
> Message: 8
> Date: Wed, 7 Jan 2004 15:09:20 -0000
> From: "Iskandar" 
> Subject: [mems-talk] Help with aligning two wafers
> To: 
> Message-ID: <012e01c3d530$3a32a550$57dc6f83@gremlin>
> Content-Type: text/plain;     charset="iso-8859-1"
>
> Hi all,
>
> I was hoping someone could help me with aligning two Si wafers. Its to
> make a micromotor whereby the wafers contain the rotor and stator
> respectively. I was hoping that if the wafers were crystalline I could
> make pyramid holes in each using anisotropic KOH etching and drop ruby
> balls between the two wafers to align them. However this requires a film
> of Si Nitride on each wafer, which is tedious considering many more
> features have to be laid out as well.
>
> Any help at all will be considered. The alignment preferebaly should be as
> accurate as possible - however realistically the stator is about 1000um
> (1mm) diameter so some error can be tolerated.
>
> Thanks all for the help - ISSA
>
> ------------------------------
>
>