Two simple suggestions:

  1)  If you can change your illumination from direct through the optics to
side illumination, that might help.
  2)  Do an extra first step to deposit aligment marks (perhaps by metal
lift off)

Good luck.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On
Behalf Of ERIC SIMONE
Sent: Thursday, January 08, 2004 5:51 PM
To: [email protected]
Subject: [mems-talk] seeing glass alignment keys


Hello,

An interesting problem has arisen and I was wondering if anyone had any
suggestions. I'm processing on glass chips and the first step is a glass
etch. However, this means that my first set of alignment marks are
transparent and I'm having a hard time finding them with the aligner to line
up the next mask. I've tried darkening them in with a marker but that
doesn't seem to help. Any ideas? Thanks much.

-Eric




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