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MEMSnet Home: MEMS-Talk: PECVD FILM RECIPE for Plasmatherm Model 760
PECVD FILM RECIPE for Plasmatherm Model 760
2004-01-10
[email protected]
PECVD FILM RECIPE for Plasmatherm Model 760
[email protected]
2004-01-10
Hello
I'm bringing  a Plasmatherm Model 760 system online and am looking for some
recipe parameters to use to start my characterization process work. I will
eventually be validating a Thin film Nitride Process. Also any issues with this
equipment that I might watch for or work through or around to address my goal of
validating the equipment for this thin film application would be welcome.
Thank you - Liz

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