MEMS-Talk Members--

Perhaps the most common question on this newsgroup is of the type
"How do I etch material A without etching material B?"
To help answer these question, we have published two papers with over 600 of our
own measured etched rates of dozens of materials in different etches. The papers
also cover sample preparation, etch parameters, and measurement techniques.

The references are

Kirt R. Williams and Richard S. Muller, "Etch Rates for Micromachining
Processing," Journal of Microelectromechanical Systems, vol. 5, no. 4, Dec.
1996, pp. 256-269.
Online at http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates1(1996).pdf
and
Kirt R. Williams, Kishan Gupta, and Matthew Wasilik, "Etch Rates for
Micromachining Processing-Part II," Journal of Microelectromechanical Systems,
vol. 12, no. 6, Dec. 2003, pp. 761-778.
Online at http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates2(2003).pdf
    --Kirt Williams