Hi Melissa,

'APC' = Automatic Pressure Control, and the 'angle' refers to the angle of
the pendulum or butterfly valve inside your system.

For more details about how it affects etch rate and profile, please do not
hesitate to contact us on directly on [email protected]

yours sincerely

Carolyn

--------------------------------------------------------------------------------
-------------------------------------

Dr Carolyn Short
Marketing Communications Engineer
Surface Technology Systems plc, Imperial Park, Newport, NP10 8UJ, U.K.
www.stsystems.com


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Hi,
Am using an STS ICP Deep Reactive Ion Etcher. Have noticed that the APC
angle
is slightly different in different protocols and this seems to affect the
etch
outcome. Could I ask what is APC angle and how does it affect etch profile
and
speed. Thanks.

Regards,
Melissa


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