Cr is normally resistant to BHF. If the transen Gold TFA-etchant is based on
KI/I2, then the platinum should be resistant to this as well. Since however
you seem to have all four of the metals being exposed to the solutions,
there might be some electro-chemical effect that might induce etching. I
think the chance is small, but since I've never tried this combination I
can't say for certain that they won't be etched.

Good luck,
Jason

___________________________________________________________
Jason Viotty
Senior Process Engineer
C2V
http://www.c2v.nl


-----Original Message-----
From: delphine meunier [mailto:[email protected]]
Sent: donderdag 15 januari 2004 15:58
To: [email protected]
Subject: [mems-talk] Is Gold etchant an B-HF compatible with Chromium?


Hi all,

Did someone know if Gold etchant and B-HF(Titanum etchant) compatible with
chromium and Platinium??

I mean, I have Cr/Pt Pattern, after I have deposited Ti/Au. I would like to
etch ,but wet, first the Gold (Gold etchant like Transene Gold TFA )and
second Titanium (with B-HF), but I don't know if the Cr layer can be
deteriorated. Did someone can help me?

Thank you,

Regards,


Delphine.


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