This sounds like a great challange for the MEMS community. Why don't we try to
get a forum together to discuss ideas on how to dry etch pyrex,soda lime glass,
quartz ect. Let's try something like "The ideal dry etch tool for etching pyrex
ect would have the following hardware/process features."

I would submit that the system must have an electrostatic helium backside clamp
capable of holding glass wafer with backside pressure of say 20 torr and a gas
flow of <1sccm
Bob Henderson

Next?????????