Guy,

The concentration of TMAH as used in developer solution is typically too low to
effectively etch Silicon (at maybe 2%?).  You should try a chemical manufacturer
such as Aldrich, where you can get a pre-mixed solution that is a 24%
concentration.

Neal

Guy Haché  wrote:
Hi,

We have a bottle of tmah wich has photoresit developer written on it. Can we
use this tmah to etch Si?

Is it possible that there's additives in it which could diminish the etch rate?

Thank's

Guy Haché, M.Sc.A.
Assistant de recherche, research assistant
--------------------------------------------------------
Département de génie électrique et de génie informatique
Université de Sherbrooke
2500, boulevard Université
Sherbrooke (Québec) Canada
J1K 2R1
Téléphone/phone : (819) 821-8000 3706
Télécopieur/fax : (819) 821-7937
e-mail: [email protected]
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