Dear Duhyun Lee,

you will get the glass (all types) from Plan Optik in Germany.

Thickness, ttv and other specifications are depending on the size.

Please feel free to contact me directly.

Best regards,

Carsten Wesselkamp

Plan Optik GmbH
Elsoff / Germany
http://www.planoptik.com


> -----Original Message-----
> From: Lee, Duhyun [mailto:[email protected]]
> Sent: Tuesday, January 20, 2004 1:22 AM
> To: [email protected]
> Subject: [mems-talk] wafer and glass for SOG
>
>
> Dear MEMS-talkers,
> I'm trying to make SOG wafer by anodic bonding and CMP.
> Could you recommend me the Si wafer and glass for it?
>
> I want to know the followings;
>  - kind of glass - I'm gonna try corning 7059 or 1737F.
>  - thickness of glass and Si wafer
>  - TTV level of Si wafer and glass
>  - other factors I should consider
>
> Thank you
>
> Lee, Duhyun
>
> ========================================
> [email protected]
> Technology Innovation Center(TIC)
> Dep. of Advanced Materials Eng.
> Sungkyunkwan University, KOREA
> Tel +82-31-290-5645
> Fax +82-31-290-5644
> ========================================
>