Dear MEMS group!

I want to compare different machining processes with respect to their surface
quality (surface roughness!). Can anyone provide rough data or even a scientific
reference on the surfce roughness of SU-8? Is there a difference on the
horizontal planes and the vertical sidewalls?

How good is the surface quality of SU-8 compared with other machining techniques
such as UV/X-ray LIGA or electroforming?

Any help and any hint will be greatly welcomed!

Stephan