I found a photoresist liftoff process worked well with e-beam evaporated
films < 0.5um thick. This was on glass - the surface had to be silanised
first to get reasonable adhesion for the film. It was still a very fragile
layer, though.

Jonathan

-----Original Message-----
From: FENG Chun Hua [mailto:[email protected]]
Sent: 26 January 2004 03:27
To: [email protected]
Subject: [mems-talk] Patterning Teflon


Dear all,
  May somebody have experience of patterning an dielectric layer like
Teflon AF? Your kind help will be greatly appreciated.

Regards
Allen





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