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MEMSnet Home: MEMS-Talk: dry film resist
dry film resist
2004-01-27
Jan Friday
dry film resist
Jan Friday
2004-01-27
Did you solve this problem? I used a different film but had the same thing
happen. First of all I had the wrong dilution (too strong) for the
developer!! So I rectified that but still had the film coming off the
sample. Surface cleanliness is important to get good adhesion, so check
that. I found that my film eventually adhered when I increased the exposure
time. I had enough exposure before to develop a good pattern but not enough
to chemically change the film enough to give it good adhesion to the
substrate. Hope this helps.

 Jan


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