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MEMSnet Home: MEMS-Talk: Pt etching
Pt etching
1997-02-20
Rob
Pt etching
Rob
1997-02-20
Other than using lift off I would like to pattern Pt by ethcing.
Does anyone know where I could fine the etch rate of Pt using Aqua Regia
at 70 C (3 part hydrocloric 1 part Nitric acid)?

Thank you,

Rob
[email protected]
Microfabrication Application Laboratories
University of Illinois at Chicago


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