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MEMSnet Home: MEMS-Talk: re need help for piezoresistive coefficient
re need help for piezoresistive coefficient
2004-02-01
Finn Schixeon
2004-02-02
Gert Eriksen
re need help for piezoresistive coefficient
Finn Schixeon
2004-02-01
Hallo,

I am building a silicon pressure sensor and the
sensing mechanism is the use of piezoresistors.

Is there any equation to determine how much doping of
boron i need to create a piezoresistor of a certain
piezoresistive coeeficient.

If not is there a standard doping concentration for
piezoresistors.

Thanks
Finn






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