Hi,

I use SU-8 (2000 series) to make multilever mould for PDMS microfludics. I
tried both silicon and glass as the substrate. The SU-8 exposure and
development are fine, the mould looks good. But when I peeled PDMS from the
mould, most of the SU-8 structure are peeled off with PDMS, the mould can't
be reused. It seems the adhension between SU-8 and the substrate is very
poor. Anyone could give me some suggestionon how to improve the adhesion? If
I need underexpose SU-8 to improve the adhension? Thanks!

Juntao

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