using HDMS is not necessary for the first 2 microns layer of SU8...

----- Original Message -----
From: "Bill Moffat" 
To: "General MEMS discussion" 
Sent: Wednesday, February 04, 2004 5:14 PM
Subject: RE: [mems-talk] SU-8 adhension problem


Juntao,
        Are you using HMDS adhesion promoter and are you balancing the
primed surface tension to the liquid surface tension of the SU8.  Contact me
directly I will go into details to get the best adhesion between your
substrate and liquid.  Bill Moffat

-----Original Message-----
From: Juntao Xu [mailto:[email protected]]
Sent: Tuesday, February 03, 2004 11:02 AM
To: [email protected]
Subject: [mems-talk] SU-8 adhension problem


Hi,

I use SU-8 (2000 series) to make multilever mould for PDMS microfludics. I
tried both silicon and glass as the substrate. The SU-8 exposure and
development are fine, the mould looks good. But when I peeled PDMS from the
mould, most of the SU-8 structure are peeled off with PDMS, the mould can't
be reused. It seems the adhension between SU-8 and the substrate is very
poor. Anyone could give me some suggestionon how to improve the adhesion? If
I need underexpose SU-8 to improve the adhension? Thanks!

Juntao

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