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MEMSnet Home: MEMS-Talk: High temperature behaviour of Silicon
RE: Glass substrate supplier
2004-02-05
Carsten Wesselkamp
High temperature behaviour of Silicon
2004-02-05
Shay Kaplan
High temperature behaviour of Silicon
Shay Kaplan
2004-02-05
> Above 600 deg C, Silicon shows plastic deformation under stress on top of it's
> usual elastic deformation.
> Shay
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