>Does anyone know where i can find info on the behaviour of the thin film
 >resistivity of Titanium.
 >Been searching the litterature but haven't had much success.

Versus which parameter? For as-deposited films, contamination is by far (by
REALLY far) the most important influence.
cheers,
klaus
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Klaus Beschorner
Metron Technology Europe, PVD (Eclipse) Process Manager
Drosselweg 6,71120 Grafenau,Germany. Tel +49-7033-45683