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MEMSnet Home: MEMS-Talk: material thermal and electrical properties
material thermal and electrical properties
2004-02-13
Sebastian Sosin
material thermal and electrical properties
Sebastian Sosin
2004-02-13
I am doing a electro-thermal simulation in Coventor 2003 and its materials
database is very poor and full of bugs.
I need the following properties:  TCE, Thermal Conduction, Specific Heat,
Electric Conduction for <110> Silicon, poli Silicon, Silicon Nitride,
Silicon Dioxide, Platinum and Chromium.
For poli Silicon I need usual values for a decent poli Silicon heater.


If somebody knows anything about this, please help me!

____________________________________________________________________________
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Sebastian Sosin
research assistant
National Institute for Research and Development in Microtechnologies (IMT,
Romania)
ICQ#: 133392471
YM: sosin_sebastian
* Home Tel#:   +4021 771.25.05       E-mail me home

* Mobile Tel#:  +40723.301.581        E-mail me at work

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