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Micro-heater in a channel?
2004-02-13
Zhizhong Yin
Micro-heater in a channel?
Zhizhong Yin
2004-02-13
Dear MEMS members,

who has the experience of making micro-heater and putting it in a
micro-channel (about 100-200 micron in diameter) besides silicon
fabrication? We need the heater
suspend in the channel,not on the wall. We want to use the heater to
vapor bubbles and don't want to lose too much heat through the wall, so it
would be better to be suspended in the channel instead of on the wall.

Thanks

Zhizhong Yin
Phone#: 410-516-8525(o)          Johns Hopkins University
        410-662-4760(h)          200 Latrobe Hall
email:[email protected]     3400 N. Charles Street
homepage:www.me.jhu.edu/~zzyin   Baltimore MD 21218
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