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MEMSnet Home: MEMS-Talk: questions for Tungsten on BCB
questions for Tungsten on BCB
2004-02-13
[email protected]
2004-02-17
Kirt Williams
questions for Tungsten on BCB
[email protected]
2004-02-13
Hello, Friends,

I am planning to deposit/sputter 1um-thick tungsten onto the BCB substrate. is
there anyone who has such kind of experience so can give me some advice? I am
concerned with the adhesion and thickness limit and the uniformity regarding
this process.

Thanks

Michael


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